Rapid thermal processing of TiN coatings deposited by chemical and physical vapor deposition using a low-energy, high-current electron beam: Microstructural studies and properties
Titel:
Rapid thermal processing of TiN coatings deposited by chemical and physical vapor deposition using a low-energy, high-current electron beam: Microstructural studies and properties
Auteur:
Perry, Anthony J. Matossian, Jesse N. Vajo, John J. Doty, Robert E. Bull, Steve J. Page, Trevor F. Proskurovsky, Dmitri I. Rotshtein, Vladimir P. Markov, Alexey B. Rice-Evans, Peter C. Taylor, James Geist, Daniel E.
Verschenen in:
Metallurgical and materials transactions. A, Physical metallurgy and materials science