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Contribution of ICP-IDMS to the certification of antimony implanted in a silicon wafer – comparison with RBS and INAA results |
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Title: |
Contribution of ICP-IDMS to the certification of antimony implanted in a silicon wafer – comparison with RBS and INAA results |
Author: |
Pritzkow, W. Vogl, J. Berger, A. Ecker, K. Grötzschel, R. Klingbeil, P. Persson, L. Riebe, G. Wätjen, U. |
Appeared in: |
Fresenius' journal of analytical chemistry |
Paging: |
Volume 371 (2001) nr. 6 pages 867-873 |
Year: |
2001 |
Contents: |
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Publisher: |
Springer-Verlag, Berlin/Heidelberg |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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