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                                       Details for article 9 of 30 found articles
 
 
  Contribution of ICP-IDMS to the certification of antimony implanted in a silicon wafer – comparison with RBS and INAA results
 
 
Title: Contribution of ICP-IDMS to the certification of antimony implanted in a silicon wafer – comparison with RBS and INAA results
Author: Pritzkow, W.
Vogl, J.
Berger, A.
Ecker, K.
Grötzschel, R.
Klingbeil, P.
Persson, L.
Riebe, G.
Wätjen, U.
Appeared in: Fresenius' journal of analytical chemistry
Paging: Volume 371 (2001) nr. 6 pages 867-873
Year: 2001
Contents:
Publisher: Springer-Verlag, Berlin/Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 9 of 30 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands