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  How to reduce the Al-texture in AlN films during film preparation
 
 
Title: How to reduce the Al-texture in AlN films during film preparation
Author: Yin, Ju-qian
Chen, Xi-ming
Yang, Bao-he
Zhang, Qian
Wu, Xiao-guo
Appeared in: Optoelectronics letters
Paging: Volume 8 (2012) nr. 5 pages 356-358
Year: 2012
Contents:
Publisher: Tianjin University of Technology, Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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