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Journal description
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Details for article 18 of 19 found articles
| Title: |
Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices |
| Author: |
Li, Dong-ling Wen, Zhi-yu Shang, Zheng-guo She, Yin |
| Appeared in: |
Optoelectronics letters |
| Paging: | Volume 12 (2016) nr. 3 pages 182-187 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Tianjin University of Technology, Tianjin |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 19 found articles
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