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248 nm imaging photolithography assisted by surface plasmon polariton interference |
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Title: |
248 nm imaging photolithography assisted by surface plasmon polariton interference |
Author: |
Tian, Man-man Mi, Jia-jia Shi, Jian-ping Wei, Nan-nan Zhan, Ling-li Huang, Wan-xia Zuo, Ze-wen Wang, Chang-tao Luo, Xian-gang |
Appeared in: |
Optoelectronics letters |
Paging: |
Volume 10 (2014) nr. 1 pages 24-26 |
Year: |
2014 |
Contents: |
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Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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