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                                       Details for article 23 of 26 found articles
 
 
  The preparation and characterization of amorphous SiCN thin films
 
 
Title: The preparation and characterization of amorphous SiCN thin films
Author: Jin-chai, Li
Xian-feng, Lu
Zi-hong, Zhang
Huai-xi, Guo
Ming-sheng, Ye
Appeared in: Wuhan University journal of natural sciences
Paging: Volume 6 () nr. 3 pages 665-669
Year: 2008-02-04
Contents:
Publisher: Wuhan University, Wuhan
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 23 of 26 found articles
 
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