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Journal description
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Details for article 35 of 52 found articles
| Title: |
Mask synthesis and verification based on geometric model for surface micro-machined MEMS |
| Author: |
Jian-hua, Li Yu-sheng, Liu Shu-ming, Gao |
| Appeared in: |
Journal of Zhejiang University. Science A, Applied Physics and Engineering |
| Paging: | Volume 6 (2005) nr. 9 pages 1007-1010 |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Zhejiang University Press, Hangzhou |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 35 of 52 found articles
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