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Journal description
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Details for article 14 of 39 found articles
| Title: |
Development of a pad conditioning simulation module with a diamond dresser for CMP applications |
| Author: |
Yeh, Hsiu-Ming Chen, Kuo-Shen |
| Appeared in: |
The international journal of advanced manufacturing technology |
| Paging: | Volume 50 (2010) nr. 1-4 pages 1-12 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Springer-Verlag, London |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 39 found articles
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