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In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope |
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Title: |
In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope |
Author: |
Tian, Dongyu Xu, Zongwei Liu, Lei Zhou, Zhanqi Zhang, Junjie Zhao, Xuesen Hartmaier, Alexander Liu, Bing Song, Le Luo, Xichun |
Appeared in: |
The international journal of advanced manufacturing technology |
Paging: |
Volume 115 () nr. 7-8 pages 2299-2312 |
Year: |
2021-05-22 |
Contents: |
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Publisher: |
Springer London, London |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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