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                                       Details for article 14 of 30 found articles
 
 
  Numerical investigation of the effect of variation of gas mixture ratio on density distribution of etchant species (Br, Br+, Cl, Cl+, and H) in HBr/Cl2/Ar plasma discharge
 
 
Title: Numerical investigation of the effect of variation of gas mixture ratio on density distribution of etchant species (Br, Br+, Cl, Cl+, and H) in HBr/Cl2/Ar plasma discharge
Author: Majeed, Muhammad
Gul, Banat
Zia, Gulfam
Aman-ur-Rehman,
Appeared in: The European physical journal. D, Atomic, molecular and optical physics
Paging: Volume 74 () nr. 6 pages xx
Year: 2020-06-11
Contents:
Publisher: Springer Berlin Heidelberg, Berlin/Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 14 of 30 found articles
 
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