Numerical investigation of the effect of variation of gas mixture ratio on density distribution of etchant species (Br, Br+, Cl, Cl+, and H) in HBr/Cl2/Ar plasma discharge
Title:
Numerical investigation of the effect of variation of gas mixture ratio on density distribution of etchant species (Br, Br+, Cl, Cl+, and H) in HBr/Cl2/Ar plasma discharge
Author:
Majeed, Muhammad Gul, Banat Zia, Gulfam Aman-ur-Rehman,
Appeared in:
The European physical journal. D, Atomic, molecular and optical physics