PIC simulations of capacitively coupled oxygen rf discharges
Titel:
PIC simulations of capacitively coupled oxygen rf discharges
Auteur:
Matthias, Paul Bandelow, Gunnar Matyash, Konstantin Duras, Julia Hacker, Philipp Kahnfeld, Daniel Kemnitz, Stefan Lewerentz, Lars Lüskow, Karl F. Meichsner, Jürgen Schneider, Ralf
Verschenen in:
The European physical journal. D, Atomic, molecular and optical physics