Integrated micro-plasmas in silicon operating in helium
Titel:
Integrated micro-plasmas in silicon operating in helium
Auteur:
Dussart, R. Overzet, L. J. Lefaucheux, P. Dufour, T. Kulsreshath, M. Mandra, M. A. Tillocher, T. Aubry, O. Dozias, S. Ranson, P. Lee, J. B. Goeckner, M.
Verschenen in:
The European physical journal. D, Atomic, molecular and optical physics