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Journal description
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Details for article 9 of 55 found articles
| Title: |
Carbon-free SiOx films deposited from octamethylcyclotetrasiloxane (OMCTS) by an atmospheric pressure plasma jet (APPJ) |
| Author: |
Schäfer, J. Foest, R. Quade, A. Ohl, A. Meichsner, J. Weltmann, K. D. |
| Appeared in: |
The European physical journal. D, Atomic, molecular and optical physics |
| Paging: | Volume 54 (2009) nr. 2 pages 211-217 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 55 found articles
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