A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
Titel:
A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
Auteur:
Shibalov, M. V. Porokhov, N. V. Mumlyakov, A. M. Trofimov, I. V. Dyud’bin, G. D. Timofeeva, E. R. Tagachenkov, A. M. Anufriev, Yu. V. Zenova, E. V. Tarkhov, M. A.