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Microscopic Examination of the Silicon Surface Subjected to High-Dose Silver Implantation |
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Title: |
Microscopic Examination of the Silicon Surface Subjected to High-Dose Silver Implantation |
Author: |
Vorob’ev, V. V. Rogov, A. M. Osin, Yu. N. Nuzhdin, V. I. Valeev, V. F. Eidel’man, K. B. Tabachkova, N. Yu. Ermakov, M. A. Stepanov, A. L. |
Appeared in: |
Technical physics |
Paging: |
Volume 64 (2019) nr. 2 pages 195-202 |
Year: |
2019 |
Contents: |
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Publisher: |
Pleiades Publishing, Moscow |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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