Effect of rapid thermal annealing on the properties of thin dielectric films of gadolinium, titanium, and erbium oxides on the silicon carbide surface
Titel:
Effect of rapid thermal annealing on the properties of thin dielectric films of gadolinium, titanium, and erbium oxides on the silicon carbide surface
Auteur:
Bacherikov, Yu. Yu. Dmitruk, N. L. Konakova, R. V. Kondratenko, O. S. Lytvyn, O. S. Milenin, V. V. Okhrimenko, O. B. Kapitanchuk, L. M. Svetlichnyi, A. M. Polyakov, V. V. Shelcunov, A. A.