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Journal description
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Details for article 3 of 15 found articles
| Title: |
Calculation of the erosion profile of a cathode for magnetron ion-sputtering systems |
| Author: |
Burmakinskii, I. Yu. Rogov, A. V. |
| Appeared in: |
Technical physics |
| Paging: | Volume 48 (2003) nr. 10 pages 1264-1269 |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Nauka/Interperiodica, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 15 found articles
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