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                                       Details for article 22 of 31 found articles
 
 
  Preparation of high-quality epitaxial silicon layers by vapor-phase epitaxy
 
 
Title: Preparation of high-quality epitaxial silicon layers by vapor-phase epitaxy
Author: Samoilov, N. A.
Eliseev, A. V.
Shutov, S. V.
Appeared in: Technical physics
Paging: Volume 42 (1997) nr. 2 pages 241-242
Year: 1997
Contents:
Publisher: Nauka/Interperiodica, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 22 of 31 found articles
 
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