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Thickness measurement of GaN epilayer using high resolution X-ray diffraction technique |
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Titel: |
Thickness measurement of GaN epilayer using high resolution X-ray diffraction technique |
Auteur: |
Feng, Gan Zhu, Jianjun Shen, Xiaoming Zhang, Baoshun Zhao, Degang Wang, Yutian Yang, Hui Liang, Junwu |
Verschenen in: |
Science in China. Series G, Physics, Mechanics and Astronomy |
Paginering: |
Jaargang 46 () nr. 4 pagina's 437-440 |
Jaar: |
2007-08-15 |
Inhoud: |
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Uitgever: |
Science in China Press, Beijing |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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