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Journal description
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Details for article 1 of 9 found articles
| Title: |
Application of optical proximity correction technology |
| Author: |
Cai, YiCi Zhou, Qiang Hong, XianLong Shi, Rui Wang, Yang |
| Appeared in: |
Science in China. Series F, Information Sciences |
| Paging: | Volume 51 (2008) nr. 2 pages 213-224 |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Science in China Press, Beijing |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 9 found articles
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