Titanium Nitride Plasmonic Nanohole Arrays for CMOS-Compatible Integrated Refractive Index Sensing: Influence of Layer Thickness on Optical Properties
Titel:
Titanium Nitride Plasmonic Nanohole Arrays for CMOS-Compatible Integrated Refractive Index Sensing: Influence of Layer Thickness on Optical Properties
Auteur:
Reiter, Sebastian Han, Weijia Mai, Christian Spirito, Davide Jose, Josmy Zöllner, Marvin Fursenko, Oksana Schubert, Markus Andreas Stemmler, Ivo Wenger, Christian Fischer, Inga Anita