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Details for article 2 of 9 found articles
| Title: |
Dependence of Sputtering Coefficient on Energy and Incidence Angle of Bombarding Particles. Energy Spectrum and Average Energy of Sputtered Particles by the Example of a Tungsten Target |
| Author: |
Babenko, P. Yu. Mikhailov, V. S. Shergin, A. P. Zinoviev, A. N. |
| Appeared in: |
Plasma physics reports |
| Paging: | Volume 50 () nr. 9 pages 1056-1065 |
| Year: |
2024-10-27 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 9 found articles
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