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Journal description
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Details for article 8 of 11 found articles
| Title: |
Plasma-Enhanced Chemical Vapor Deposition of Silicon Films at Low Pressure in GEC Reference Cell |
| Author: |
Siari, K. Rebiai, S. Bahouh, H. Bouanaka, F. |
| Appeared in: |
Plasma physics reports |
| Paging: | Volume 46 () nr. 6 pages 667-674 |
| Year: |
2020-06-25 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 11 found articles
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