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                                       Details for article 8 of 11 found articles
 
 
  Plasma-Enhanced Chemical Vapor Deposition of Silicon Films at Low Pressure in GEC Reference Cell
 
 
Title: Plasma-Enhanced Chemical Vapor Deposition of Silicon Films at Low Pressure in GEC Reference Cell
Author: Siari, K.
Rebiai, S.
Bahouh, H.
Bouanaka, F.
Appeared in: Plasma physics reports
Paging: Volume 46 () nr. 6 pages 667-674
Year: 2020-06-25
Contents:
Publisher: Pleiades Publishing, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 8 of 11 found articles
 
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