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                                       Details for article 7 of 9 found articles
 
 
  Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma
 
 
Title: Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma
Author: Sitanov, D. V.
Pivovarenok, S. A.
Appeared in: Plasma physics reports
Paging: Volume 44 (2018) nr. 8 pages 713-722
Year: 2018
Contents:
Publisher: Pleiades Publishing, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 9 found articles
 
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