Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System
Titel:
Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System
Auteur:
Aleksandrov, A. F. Petrov, A. K. Vavilin, K. V. Kralkina, E. A. Neklyudova, P. A. Nikonov, A. M. Pavlov, V. B. Ayrapetov, A. A. Odinokov, V. V. Sologub, V. A. Pavlov, G. Ya.