Study of the generation of the 13.5-nm EUV radiation from Sn ions in a CO2 laser-produced plasma
Titel:
Study of the generation of the 13.5-nm EUV radiation from Sn ions in a CO2 laser-produced plasma
Auteur:
Volkov, G. S. Zaitsev, V. I. Makarov, K. N. Napartovich, A. P. Rerikh, V. K. Smakovskii, Yu. B. Stepanov, A. E. Cherkovets, V. E. Rupasov, A. A. Satov, Yu. A.