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Journal description
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Details for article 26 of 33 found articles
| Title: |
Production of polycrystalline silicon from monosilane in the electron-beam plasma |
| Author: |
Konstantinov, V. O. Shchukin, V. G. Sharafutdinov, R. G. Karsten, V. M. Gartvich, G. G. Semenova, O. I. |
| Appeared in: |
Plasma physics reports |
| Paging: | Volume 36 (2010) nr. 13 pages 1278-1283 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 33 found articles
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