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Journal description
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Details for article 3 of 9 found articles
| Title: |
Investigation of plasma characteristics in an unbalanced magnetron sputtering system |
| Author: |
Solov’ev, A. A. Sochugov, N. S. Oskomov, K. V. Rabotkin, S. V. |
| Appeared in: |
Plasma physics reports |
| Paging: | Volume 35 (2009) nr. 5 pages 399-408 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 9 found articles
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