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Journal description
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Details for article 2 of 10 found articles
| Title: |
Controlling plasma composition during carbon film deposition in microwave discharges by means of optical-emission spectroscopy |
| Author: |
Dvorkin, V. V. Dzbanovskii, N. N. Minakov, P. V. Suetin, N. V. Yur'ev, A. Yu. |
| Appeared in: |
Plasma physics reports |
| Paging: | Volume 29 (2003) nr. 9 pages 789-795 |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Nauka/Interperiodica, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 10 found articles
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