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                                       Details for article 9 of 14 found articles
 
 
  High-power gas-discharge EUV source
 
 
Title: High-power gas-discharge EUV source
Author: Borisov, V. M.
Vinokhodov, A. Yu.
Ivanov, A. S.
Kiryukhin, Yu. B.
Mironov, S. V.
Mishchenko, V. A.
Prokof’ev, A. V.
Khristoforov, O. B.
Appeared in: Plasma physics reports
Paging: Volume 28 (2002) nr. 10 pages 877-881
Year: 2002
Contents:
Publisher: Nauka/Interperiodica, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 9 of 14 found articles
 
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