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Journal description
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Details for article 5 of 13 found articles
| Title: |
Ionization of sputtered metal atoms in a microwave ECR plasma source |
| Author: |
Poluektov, N. P. Kharchenko, V. N. Usatov, I. G. |
| Appeared in: |
Plasma physics reports |
| Paging: | Volume 27 (2001) nr. 7 pages 625-633 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Nauka/Interperiodica, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 13 found articles
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