Effect of the nand p-type Si(100) substrates with a SiC buffer layer on the growth mechanism and structure of epitaxial layers of semipolar AlN and GaN
Titel:
Effect of the nand p-type Si(100) substrates with a SiC buffer layer on the growth mechanism and structure of epitaxial layers of semipolar AlN and GaN
Auteur:
Bessolov, V. N. Grashchenko, A. S. Konenkova, E. V. Myasoedov, A. V. Osipov, A. V. Red’kov, A. V. Rodin, S. N. Rubets, V. P. Kukushkin, S. A.