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                                       Details for article 7 of 13 found articles
 
 
  Lifetime Extension of the Gas Discharge Detectors with Plasma Etching of Silicon Deposits in 80%CF4 + 20%CO2
 
 
Title: Lifetime Extension of the Gas Discharge Detectors with Plasma Etching of Silicon Deposits in 80%CF4 + 20%CO2
Author: Gavrilov, G. E.
Vakhtel, V. M.
Maysuzenko, D. A.
Tavtorkina, T. A.
Fetisov, A. A.
Shvetsova, N. Yu.
Appeared in: Physics of atomic nuclei
Paging: Volume 80 (2017) nr. 9 pages 1532-1538
Year: 2017
Contents:
Publisher: Pleiades Publishing, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 13 found articles
 
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