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                                       Details for article 5 of 16 found articles
 
 
  Diffractive phase element for shrinking focal spot diameter: Design, fabrication, and application to laser beam lithography
 
 
Title: Diffractive phase element for shrinking focal spot diameter: Design, fabrication, and application to laser beam lithography
Author: Ogura, Yusuke
Tanida, Jun
Ichioka, Yoshiki
Mokuno, Yoshiaki
Matsuoka, Katsunori
Appeared in: Optical review
Paging: Volume 8 () nr. 6 pages 416-421
Year: 2008-07-09
Contents:
Publisher: Springer-Verlag, Tokyo
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 16 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands