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Journal description
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Details for article 17 of 27 found articles
| Title: |
Optical design of a 1-to-1 lithography projection |
| Author: |
Huang, Jiun-Woei |
| Appeared in: |
Optical review |
| Paging: | Volume 23 (2016) nr. 5 pages 870-877 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Springer Japan, Tokyo |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 27 found articles
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