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Journal description
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Details for article 32 of 40 found articles
| Title: |
Phase-shifting mask design for interference exposure of chirp blazed grating |
| Author: |
Ura, Shogo Kintaka, Kenji Awazu, Hideyuki Awatsuji, Yasuhiro Nishii, Junji |
| Appeared in: |
Optical review |
| Paging: | Volume 18 (2011) nr. 1 pages 99-102 |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Optical Society of Japan, Japan |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 32 of 40 found articles
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