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The fabrication of microlens array in PMMA material with the assistant of nickel pillars by LIGA technology and thermal reflow method |
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Titel: |
The fabrication of microlens array in PMMA material with the assistant of nickel pillars by LIGA technology and thermal reflow method |
Auteur: |
Liang, Xiaoxiao Yan, Mingming Xu, Yuanze Zhang, Tianchong Zhang, Dongni Zhang, Changrui Wang, Bo Yi, Futing Liu, Jing |
Verschenen in: |
Microsystem technologies |
Paginering: |
Jaargang 29 () nr. 5 pagina's 763-771 |
Jaar: |
2023-04-24 |
Inhoud: |
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Uitgever: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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