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Journal description
All volumes of the corresponding journal
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Details for article 15 of 35 found articles
| Title: |
Design and verification of a structure for isolating stress in sandwich MEMS accelerometer |
| Author: |
Mo, Yuming Yang, Jie Peng, Bo Xie, Guofen Tang, Bin |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 27 () nr. 5 pages 1943-1950 |
| Year: |
2020-08-10 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 35 found articles
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