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                                       Details for article 9 of 25 found articles
 
 
  Design and analysis of perforated MEMS resonator
 
 
Title: Design and analysis of perforated MEMS resonator
Author: Guha, Koushik
Dutta, Hrishikesh
Sateesh, Jasti
Baishya, S.
Srinivasa Rao, K.
Appeared in: Microsystem technologies
Paging: Volume 27 () nr. 2 pages 613-617
Year: 2018-11-23
Contents:
Publisher: Springer Berlin Heidelberg, Berlin/Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 9 of 25 found articles
 
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