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Details for article 31 of 35 found articles
| Title: |
Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization |
| Author: |
Thalluri, Lakshmi Narayana Guha, Koushik Srinivasa Rao, K. Prasad, G. Venkata Hari Sravani, K. Girija Sastry, K. S. R. Kanakala, Appala Raju Babu, P. Bose |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 26 () nr. 6 pages 2029-2041 |
| Year: |
2020-01-31 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 35 found articles
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