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Journal description
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Details for article 5 of 37 found articles
| Title: |
Analysis of a 0.1-μm stepping bi-axis piezoelectric stage using a 2-DOF lumped model |
| Author: |
Wang, Yu-Jen Yang, Chieh Sue, Chung-Yang Wang, Yeng-Tseng |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 26 () nr. 2 pages 425-436 |
| Year: |
2019-06-17 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 37 found articles
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