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A contact-enhanced MEMS inertial switch with electrostatic force assistance and multi-step pulling action for prolonging contact time |
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Titel: |
A contact-enhanced MEMS inertial switch with electrostatic force assistance and multi-step pulling action for prolonging contact time |
Auteur: |
Li, Jian Wang, Yan Li, Yue Fu, Bo Sun, Yunna Yao, Jinyuan Ding, Guifu Zhao, Xiaolin Yang, Zhuoqing |
Verschenen in: |
Microsystem technologies |
Paginering: |
Jaargang 24 (2018) nr. 7 pagina's 3179-3191 |
Jaar: |
2018 |
Inhoud: |
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Uitgever: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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