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Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion |
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Titel: |
Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion |
Auteur: |
Lee, Hak-Jun Woo, Siwoong Park, Jaehyun Jeong, Jae-Heon Kim, Myeonghyeon Ryu, Jiheun Gweon, Dae-Gab Choi, Young-Man |
Verschenen in: |
Microsystem technologies |
Paginering: |
Jaargang 24 (2017) nr. 6 pagina's 2653-2662 |
Jaar: |
2017 |
Inhoud: |
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Uitgever: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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