|
High frequency characterization and analysis of through silicon vias and coplanar waveguides for silicon interposer |
|
|
|
Titel: |
High frequency characterization and analysis of through silicon vias and coplanar waveguides for silicon interposer |
Auteur: |
Wang, Huijuan Ren, Xiaoli Zhou, Jing Pang, Cheng Song, Chongsheng Dai, Fengwei Xue, Kai Jiang, Feng Yu, Daquan Wan, Lixi |
Verschenen in: |
Microsystem technologies |
Paginering: |
Jaargang 22 (2014) nr. 2 pagina's 337-347 |
Jaar: |
2014 |
Inhoud: |
|
Uitgever: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|