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Journal description
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Details for article 12 of 26 found articles
| Title: |
Influence of grains and surface roughness in boron and phosphorus implanted LPCVD polycrystalline silicon thin film |
| Author: |
Singh, Kulwant Kumar, Sanjeev Joyce, Robin Saha, Rajesh Varghese, Soney Akhtar, Jamil |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 21 (2014) nr. 9 pages 1987-1994 |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 26 found articles
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