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Journal description
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Details for article 10 of 26 found articles
| Title: |
Fabrication of novel MEMS inertial switch with six layers on a metal substrate |
| Author: |
Du, Liqun Zhao, Ming Wang, Aoan Chen, Shengli Nie, Weirong |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 21 (2014) nr. 9 pages 2025-2032 |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 26 found articles
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