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Origin of the TTV of thin films obtained by temporary bonding ZoneBond® technology |
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Title: |
Origin of the TTV of thin films obtained by temporary bonding ZoneBond® technology |
Author: |
Montméat, P. Enot, T. Pellat, M. Fournel, F. Bally, L. Baud, L. Dechamp, J. Eleouet, R. Vignoud, L. Zussy, M. |
Appeared in: |
Microsystem technologies |
Paging: |
Volume 21 (2015) nr. 5 pages 987-993 |
Year: |
2015 |
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Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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