Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure
Titel:
Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure
Auteur:
Imbert, B. Blot, X. Tauzin, A. Salvetat, T. Lagoutte, E. Lecouvey, C. Chaira, T. Larrey, V. Bridoux, C. Fournel, F. Delaye, V. Papon, A.-M. Moriceau, H. Carron, V.