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                                       Details for article 16 of 22 found articles
 
 
  RF MEMS switches fabrication by using SU-8 technology
 
 
Title: RF MEMS switches fabrication by using SU-8 technology
Author: Lucibello, Andrea
Proietti, Emanuela
Giacomozzi, Flavio
Marcelli, Romolo
Bartolucci, Giancarlo
Angelis, Giorgio De
Appeared in: Microsystem technologies
Paging: Volume 19 (2013) nr. 6 pages 929-936
Year: 2013
Contents:
Publisher: Springer-Verlag, Berlin/Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 16 of 22 found articles
 
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