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Journal description
All volumes of the corresponding journal
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Details for article 7 of 16 found articles
| Title: |
Effect of nitrogen doping on piezoresistive properties of a-SixCy thin film strain gauges |
| Author: |
Fraga, M. A. Furlan, H. Massi, M. Oliveira, I. C. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 16 (2010) nr. 6 pages 925-930 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 16 found articles
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